000 00443nam a2200181Ia 4500
008 180820s9999 xx 000 0 und d
020 _a0-07-019339-8
050 _aC 621.3815 El58i 1989
100 _aElliot, David J.
245 0 _aIntegrated circuit fabrication technology
250 _a2nd
260 _aNew York
260 _bMcGraw-Hill Pub.Co.
260 _c1989
300 _a540
650 _aElectric circuits
942 _cBK
999 _c60361
_d60361